Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6526996 | Dry clean method instead of traditional wet clean after metal etch | Hong-Long Chang, Hungyueh Lu, Fang-Fei Liu | 2003-03-04 |
| 6410417 | Method of forming tungsten interconnect and vias without tungsten loss during wet stripping of photoresist polymer | Nien-Yu Tsai, Hong-Long Chang, Chun-Wei Chen | 2002-06-25 |
| 6143653 | Method of forming tungsten interconnect with tungsten oxidation to prevent tungsten loss | Nien-Yu Tsai, Hong-Long Chang, Chun-Wei Chen | 2000-11-07 |
| 6123865 | Method for improving etch uniformity during a wet etching process | Wei-Chih Lin, Ming-Sheng Kao, Chih-Ming Lin | 2000-09-26 |