Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6526996 | Dry clean method instead of traditional wet clean after metal etch | Hong-Long Chang, Ming-Li Kung, Fang-Fei Liu | 2003-03-04 |
| 6500766 | Post-cleaning method of a via etching process | Hong-Long Chang, Fang-Fei Liu | 2002-12-31 |