Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837510 | Method for analyzing silicon substrate | Jiahong WU, Katsuhiko Kawabata, Sungjae Lee | 2023-12-05 |
| 10024801 | Analysis system for online-transferred analysis sample | Katsuhiko Kawabata, Tatsuya Ichinose | 2018-07-17 |
| 9741627 | Substrate etching apparatus and substrate analysis method | Katsuhiko Kawabata, Takuma Hayashi, Sungjae Lee, Jin Kunika | 2017-08-22 |