ME

Mike Elbert

MT Mattson Technology: 1 patents #139 of 230Top 65%
Overall (All Time): #3,415,388 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7037797 Localized heating and cooling of substrates Sohaila Shooshtarian, Narasimha Acharya, Andreas Tillmann, Dieter Zernickel 2006-05-02