Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7030401 | Modular substrate measurement system | Ivo Raaijmakers, Alain Gaudon, Pierre Astegno | 2006-04-18 |
| 6954267 | Device for measuring surface defects | Andreas Lang, Michael Schweiger | 2005-10-11 |
| 6935201 | Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations | Eckhard Marx | 2005-08-30 |
| 6891609 | Measurement box with module for measuring wafer characteristics | — | 2005-05-10 |
| 6798513 | Measuring module | — | 2004-09-28 |
| 6734969 | Vacuum measurement device | Matthias Hampel | 2004-05-11 |
| 6420864 | Modular substrate measurement system | Ivo Raaijmakers, Alain Gaudon, Pierre Astegno | 2002-07-16 |
| 6275291 | Micropolarimeter and ellipsometer | Matthias Eberhardt | 2001-08-14 |
| 6091499 | Method and device for automatic relative adjustment of samples in relation to an ellipsometer | Oliver Depner, Matthias Eberhardt | 2000-07-18 |
| 6045064 | Under-vehicle spray device | — | 2000-04-04 |