MT

Mariste A. Thomson

XI Xinix: 2 patents #3 of 11Top 30%
LU Luxtron: 1 patents #25 of 38Top 70%
Overall (All Time): #1,653,663 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
5292605 Method for control of photoresist develop processes 1994-03-08
5196285 Method for control of photoresist develop processes 1993-03-23
5190614 Method of endpoint detection and structure therefor Steven C. Leach, Jewett W. Fowler, Herbert E. Litvak 1993-03-02