MT

Mayako Taniguchi

UL Ulvac: 1 patents #339 of 680Top 50%
Overall (All Time): #3,198,480 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8128793 Vertical substrate transfer apparatus and film-forming apparatus Hajime Nakamura, Koji Ishino, Takaaki Shindou, Junichirou Tsutsui, Yukio Kikuchi +1 more 2012-03-06