Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9011654 | Dummy substrate, and start method of, retention/modification method of deposition condition, and stop method of deposition apparatus using same | Koji Ishino, Hajime Nakamura, Mayako Matsuda, Yukio Kikuchi | 2015-04-21 |
| 8740205 | Conveyor and deposition apparatus, and maintenance method thereof | Koji Ishino, Hajime Nakamura, Mayako Matsuda, Takaharu Koshimizu | 2014-06-03 |
| 8550441 | Supporting member and carrier, and method of supporting | Koji Ishino, Hajime Nakamura, Mayako Matsuda, Yukio Kikuchi | 2013-10-08 |
| 8128793 | Vertical substrate transfer apparatus and film-forming apparatus | Hajime Nakamura, Mayako Taniguchi, Koji Ishino, Junichirou Tsutsui, Yukio Kikuchi +1 more | 2012-03-06 |