Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11274371 | Susceptor and epitaxial growth device | Shoji Nogami, Naoyuki Wada, Takayuki Kihara | 2022-03-15 |
| 11264265 | Lift pin, and epitaxial growth apparatus and method of producing silicon epitaxial wafer using the lift pin | — | 2022-03-01 |
| 11208718 | Epitaxial growth device, production method for epitaxial wafer, and lift pin for epitaxial growth device | — | 2021-12-28 |
| 8980001 | Method for manufacturing epitaxial wafer and wafer holder used in the method | Masayuki Ishibashi | 2015-03-17 |
| 8152919 | Epitaxial silicon wafer and fabrication method thereof | Takayuki Dohi, Shinji Nakahara, Masato Sakai | 2012-04-10 |
| 7989073 | Epitaxial silicon wafer and fabrication method thereof | Takayuki Dohi, Shinji Nakahara, Masato Sakai | 2011-08-02 |
| 5641113 | Method for fabricating an electronic device having solder joints | Motoaki Somaki | 1997-06-24 |