Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500693 | Run-to-run control for chemical mechanical planarization | Prakash Lakshmikanthan, Patrick D. Noll | 2019-12-10 |
| 8112168 | Process and method for a decoupled multi-parameter run-to-run controller | Kristi Bushman, Robert Ray Spangler, Stephen Arlon Meinser, Ronald Charles Roth | 2012-02-07 |
| 6348178 | Method for reducing NOx from exhaust gases produced by industrial processes | Bruce C. Sudduth, Ralph J. Slone, Vishwesh Palekar | 2002-02-19 |
| 6066303 | Apparatus and method for reducing NOx from exhaust gases produced by industrial processes | Bruce C. Sudduth, Ralph J. Slone, Vishwesh Palekar | 2000-05-23 |
| 5985222 | Apparatus and method for reducing NOx from exhaust gases produced by industrial processes | Bruce C. Sudduth, Ralph J. Slone, Vishwesh Palekar | 1999-11-16 |