| 7916273 |
Exposure apparatus and device manufacturing method |
Keiko Chiba, Keiji Yamashita |
2011-03-29 |
| 6551172 |
Polishing apparatus and polishing method |
Mikichi Ban, Takehiko Suzuki, Yasushi Sugiyama |
2003-04-22 |
| 6503361 |
Polishing method and polishing apparatus using the same |
Mikichi Ban |
2003-01-07 |
| 6142855 |
Polishing apparatus and polishing method |
Mikichi Ban, Takehiko Suzuki, Yasushi Sugiyama |
2000-11-07 |
| 6137575 |
Film thickness measuring method and apparatus |
Yasushi Sugiyama, Mikichi Ban, Takehiko Suzuki |
2000-10-24 |
| 6120349 |
Polishing system |
Kazuo Takahashi |
2000-09-19 |
| 6093081 |
Polishing method and polishing apparatus using the same |
Mikichi Ban, Kazuo Takahashi |
2000-07-25 |
| 6004187 |
Method and apparatus for measuring film thickness and film thickness distribution during polishing |
Mikichi Ban |
1999-12-21 |
| 5640377 |
Rotation information detecting apparatus and method |
Hiroshi Watanabe |
1997-06-17 |
| 5559602 |
Rotation measuring apparatus and displacement measuring apparatus |
— |
1996-09-24 |
| 5481106 |
Encoder with an optical scale and interference of zero and first order diffraction beams |
Masahiko Igaki, Ko Ishizuka |
1996-01-02 |
| 5369271 |
Rotation detector using dual position interference light |
— |
1994-11-29 |
| 5359193 |
Talbot's interference type optical encoder |
Masahiko Igaki |
1994-10-25 |
| 5302821 |
Encoder using a birefringent element and a system including the same |
Masahiko Igaki, Koh Ishizuka |
1994-04-12 |
| 4810084 |
Retinal camera |
— |
1989-03-07 |
