Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8354133 | Modifying agent for plastic fat | Midori Sakai | 2013-01-15 |
| 7061575 | Projection exposure apparatus and method | Tetsuo Taniguchi | 2006-06-13 |
| 6961114 | Optical apparatus and exposure apparatus incorporating the apparatus | Kyoji Nakamura, Taro Ogata, Susumu Mori | 2005-11-01 |
| 6825932 | Method for measuring optical feature of exposure apparatus and exposure apparatus having means for measuring optical feature | Kousuke Suzuki | 2004-11-30 |
| 6535270 | Exposure apparatus and air-conditioning apparatus for use with exposure apparatus | — | 2003-03-18 |
| 6496257 | Projection exposure apparatus and method | Tetsuo Taniguchi | 2002-12-17 |
| 6456377 | Method for measuring optical feature of exposure apparatus and exposure apparatus having means for measuring optical feature | Kousuke Suzuki | 2002-09-24 |
| 6341006 | Projection exposure apparatus | Haruo Ozawa | 2002-01-22 |
| 6172373 | Stage apparatus with improved positioning capability | Hideaki Hara, Yuji Imai | 2001-01-09 |