Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8497997 | Semiconductor device and method of manufacturing the same | — | 2013-07-30 |
| 8487305 | Semiconductor device and method of manufacturing the same | Manabu Iguchi | 2013-07-16 |
| 8158446 | Semiconductor device and method of manufacturing the same | Manabu Iguchi | 2012-04-17 |
| 6958201 | Electron beam exposure mask, electron beam exposure method, method of fabricating semiconductor device, and electron beam exposure apparatus | — | 2005-10-25 |
| 6861657 | Electron beam exposure mask, electron beam exposure method, method of fabricating semiconductor device, and electron beam exposure apparatus | — | 2005-03-01 |
| 6645676 | Electron beam exposure mask, electron beam exposure method, method of fabricating semiconductor device, and electron beam exposure apparatus | — | 2003-11-11 |
| 6352802 | Mask for electron beam exposure and method of manufacturing semiconductor device using the same | — | 2002-03-05 |