Issued Patents All Time
Showing 1–25 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10084394 | Control apparatus for capacitive electromechanical transducer, and method of controlling the capacitive electromechanical transducer | Atsushi Kandori, Makoto Takagi, Kenichi Nagae | 2018-09-25 |
| 9774276 | Capacitive electromechanical transducer | Atsushi Kandori, Makoto Takagi | 2017-09-26 |
| 9594103 | Capacitive detection type electro-mechanical transducer | Atsushi Kandori, Makoto Takagi | 2017-03-14 |
| 9321080 | Electromechanical transducer and method for detecting sensitivity variation of electromechanical transducer | Makoto Takagi | 2016-04-26 |
| 9238250 | Control apparatus for capacitive electromechanical transducer, and method of controlling the capacitive electromechanical transducer | Atsushi Kandori, Makoto Takagi, Kenichi Nagae | 2016-01-19 |
| 9233395 | Control apparatus and method for electromechanical transducer device, and measurement system | Atsushi Kandori | 2016-01-12 |
| 9101958 | Electromechanical transducer | Atsushi Kandori | 2015-08-11 |
| 9072429 | Apparatus and method for driving capacitive electromechanical transduction apparatus | Atsushi Kandori | 2015-07-07 |
| 9046793 | Light transmissive mold and apparatus for imprinting a pattern onto a material applied on a semiconductor workpiece and related methods | Nobuhito Suehira, Junichi Seki, Atsunori Terasaki, Hideki Ina | 2015-06-02 |
| 8999218 | Process for producing member having pattern, pattern transfer apparatus, and mold | Junichi Seki, Nobuhito Suehira | 2015-04-07 |
| 8928203 | Capacitive electromechanical transducer | Atsushi Kandori, Makoto Takagi | 2015-01-06 |
| 8770958 | Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction | Nobuhito Suehira, Junichi Seki, Atsunori Terasaki, Hideki Ina | 2014-07-08 |
| 8754660 | Capacitive detection type electro-mechanical transducer | Atsushi Kandori, Makoto Takagi | 2014-06-17 |
| 8654614 | Capacitive electromechanical transducer | Atsushi Kandori | 2014-02-18 |
| 8393211 | Sensor | Atsushi Kandori, Kenichi Nagae | 2013-03-12 |
| 8345339 | Optical deflector | Atsushi Kandori, Kazunari Fujii | 2013-01-01 |
| 8336380 | Angular velocity sensor | Atsushi Kandori, Kenichi Nagae | 2012-12-25 |
| 8336381 | Sensor and method of manufacturing the same | Atsushi Kandori, Kenichi Nagae, Yasuyoshi Takai | 2012-12-25 |
| 8246887 | Imprint method and process for producing a chip that change a relative position between a member to be processed and a support portion | Junichi Seki, Nobuhito Suehira | 2012-08-21 |
| 8202075 | Imprint apparatus and imprint method | Nobuhito Suehira, Junichi Seki | 2012-06-19 |
| 8136212 | Method of fabricating structure having out-of-plane angular segment | Yoshitaka Zaitsu, Chienliu Chang | 2012-03-20 |
| 8085262 | Image display apparatus and image taking apparatus including the same | Shuichi Kobayashi, Atsushi Kandori, Akira Yamamoto | 2011-12-27 |
| 8082651 | Micro-structure fabrication method | Yoshitaka Zaitsu, Chienliu Chang | 2011-12-27 |
| 7959843 | Method of fabricating structure | Yoshitaka Zaitsu, Chienliu Chang, Hironobu Maeda | 2011-06-14 |
| 7927089 | Mold, apparatus including mold, pattern transfer apparatus, and pattern forming method | Junichi Seki, Nobuhito Suehira | 2011-04-19 |