Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068153 | Situ clean for bevel and edge ring | Kaushik Alayavalli, Andrew Nguyen, Edward Haywood, Lu Liu | 2024-08-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068153 | Situ clean for bevel and edge ring | Kaushik Alayavalli, Andrew Nguyen, Edward Haywood, Lu Liu | 2024-08-20 |