Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9891274 | Device test method | Kazunari Ishii | 2018-02-13 |
| 9739828 | Probe device | — | 2017-08-22 |
| 9562942 | Probe apparatus | Eiichi Shinohara, Kenji Yamaguchi | 2017-02-07 |
| 9310814 | Cooling device operating method and inspection apparatus | — | 2016-04-12 |
| 7975759 | Temperature control method, temperature control apparatus and high/low temperature processing system | Yoshinao Kono, Toshikazu Ariyama, Kazuki Hosaka | 2011-07-12 |
| 7818972 | Water removal apparatus and inspection apparatus including same | — | 2010-10-26 |
| 7641453 | Pulsation reducing apparatus and inspection apparatus | — | 2010-01-05 |
| 7610756 | Cooling/heating apparatus and mounting apparatus | — | 2009-11-03 |
| 6959556 | Stirling refrigeration system | Takashi Inoue, Kazuhiko Mihara, Yasuo Sakamoto | 2005-11-01 |
| 6037793 | Inspecting method and apparatus for semiconductor integrated circuit | Toshio Miyazawa, Masahiko Akiyama | 2000-03-14 |
| 6032724 | Temperature control apparatus for sample susceptor | — | 2000-03-07 |
| 5198752 | Electric probing-test machine having a cooling system | Eiji Miyata, Masahiko Sugiyama, Masahiko Kohno | 1993-03-30 |
| 5084671 | Electric probing-test machine having a cooling system | Eiji Miyata, Masahiko Sugiyama, Masahiko Kohno | 1992-01-28 |