MH

Mark Halman

Lam Research: 2 patents #1,015 of 2,128Top 50%
Overall (All Time): #1,601,005 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6957621 Guide for assisting sails over stanchions 2005-10-25
5658425 Method of etching contact openings with reduced removal rate of underlying electrically conductive titanium silicide layer Paul Rhoades, David Kerr 1997-08-19
5269879 Method of etching vias without sputtering of underlying electrically conductive layer Paul Rhoades, David Kerr 1993-12-14