Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7938907 | Device for fabricating a mask by plasma etching a semiconductor substrate | Michel Puech | 2011-05-10 |
| 6528724 | Microdevice and its production method | Yukihisa Yoshida, Jiwei Jiao, Tsukasa Matsuura, Kazuhiko Tsutsumi | 2003-03-04 |