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KL Kla: 1 patents #347 of 758Top 50%
Overall (All Time): #2,478,852 of 4,157,543Top 60%
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Patent #TitleCo-InventorsDate
11908722 Automatic teaching of substrate handling for production and process-control tools Avner Safrani, Shai Mark, Amir Aizen 2024-02-20