Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7365019 | Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes | Iskander Tokmouline | 2008-04-29 |
| 6955991 | Atmospheric process and system for controlled and rapid removal of polymers from high depth to width aspect ratio holes | Iskander Tokmouline | 2005-10-18 |
| 6762136 | Method for rapid thermal processing of substrates | Iskander Tokmouline | 2004-07-13 |
| 6492613 | System for precision control of the position of an atmospheric plasma | Iskander Tokmouline | 2002-12-10 |
| 6467297 | Wafer holder for rotating and translating wafers | Iskander Tokmouline | 2002-10-22 |
| 5375064 | Method and apparatus for moving a material removal tool with low tool accelerations | — | 1994-12-20 |
| 5364496 | Highly durable noncontaminating surround materials for plasma etching | Michael Power, Richard R. Poole, George J. Gardopee | 1994-11-15 |