Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7761837 | Method of making alternating phase shift masks | Staf Verhaegen, Eric Henri Jan Hendrickx | 2010-07-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7761837 | Method of making alternating phase shift masks | Staf Verhaegen, Eric Henri Jan Hendrickx | 2010-07-20 |