Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021989 | Method for high topography patterning | Axel Nackaerts | 2011-09-20 |
| 7761837 | Method of making alternating phase shift masks | Lieve Van Look, Eric Henri Jan Hendrickx | 2010-07-20 |