| 9988264 |
Method of fabricating integrated structure for MEMS device and semiconductor device |
Bang-Chiang Lan, Wei-Cheng Wu, Hui-Min Wu, Min Chen, Tzung-I Su +1 more |
2018-06-05 |
| 9783408 |
Structure of MEMS electroacoustic transducer |
Bang-Chiang Lan, Ming-I Wang, Hui-Min Wu, Min Chen, Chien-Hsin Huang |
2017-10-10 |
| 8872287 |
Integrated structure for MEMS device and semiconductor device and method of fabricating the same |
Bang-Chiang Lan, Wei-Cheng Wu, Hui-Min Wu, Min Chen, Tzung-I Su +1 more |
2014-10-28 |
| 8798291 |
Structure of MEMS electroacoustic transducer and fabricating method thereof |
Bang-Chiang Lan, Ming-I Wang, Hui-Min Wu, Min Chen, Chien-Hsin Huang |
2014-08-05 |
| 8096048 |
Method for fabricating MEMS structure |
Bang-Chiang Lan, Ming-I Wang, Hui-Min Wu, Min Chen, Chien-Hsin Huang +1 more |
2012-01-17 |
| 7898081 |
MEMS device and method of making the same |
Bang-Chiang Lan, Wei-Cheng Wu, Hui-Min Wu, Min Chen, Chien-Hsin Huang +1 more |
2011-03-01 |
| 7851975 |
MEMS structure with metal protection rings |
Bang-Chiang Lan, Ming-I Wang, Hui-Min Wu, Min Chen, Chien-Hsin Huang +1 more |
2010-12-14 |