Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288725 | Critical dimension error analysis method | Xueru YU, Hongxia SUN, Chen Li, Pengfei Wang, Jiebin Duan +6 more | 2025-04-29 |
| 11874102 | Thick photo resist layer metrology target | Jincheng Pei | 2024-01-16 |
| 10545402 | Overlay compensation method and system thereof | Yi Lin | 2020-01-28 |