Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475291 | Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafers | Steve I. Petvai, Michael Buet | 2002-11-05 |
| 6273992 | Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafers | Steve I. Petvai, Michael Buet | 2001-08-14 |
| 6053984 | Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafers | Steve I. Petvai, Michael Buet | 2000-04-25 |