Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916461 | Method of laser scribing of semiconductor workpiece using divided laser beams | Egidijus Vanagas, Dziugas Kimbaras | 2021-02-09 |
| 10074565 | Method of laser processing for substrate cleaving or dicing through forming “spike-like” shaped damage structures | Egidijus Vanagas, Dziugas Kimbaras | 2018-09-11 |