| 8329838 |
Norbornene-type polymers, compositions thereof and lithographic processes using such compositions |
Larry F. Rhodes, Chun Chang, Pramod Kandanarachchi, Keita Ishiduka, Kotaro Endo +1 more |
2012-12-11 |
| 7799883 |
Norbornene-type polymers, compositions thereof and lithographic process using such compositions |
Larry F. Rhodes, Chun Chang, Pramod Kandanarachchi, Keita Ishiduka, Kotaro Endo +1 more |
2010-09-21 |
| 7422836 |
Dissolution rate modifiers for photoresist compositions |
Larry F. Rhodes, Brian L. Goodall, Lester Howard McIntosh, III, Robert John Duff |
2008-09-09 |
| 7341818 |
Norbornene-type monomers and polymers containing pendent lactone or sultone groups |
Xiaoming Wu, Larry F. Rhodes |
2008-03-11 |
| 7101654 |
Norbornene-type monomers and polymers containing pendent lactone or sultone groups |
Xiaoming Wu, Larry F. Rhodes |
2006-09-05 |