Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6914208 | Method for semiconductor wafer etching | Akira Shimizu | 2005-07-05 |
| 6764572 | Apparatus and method for semiconductor wafer etching | Akira Shimizu | 2004-07-20 |
| 6383900 | Method and apparatus for forming polycrystal silicon film | Akira Shimizu, Atsuki Fukazawa | 2002-05-07 |