Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7538353 | Composite barrier/etch stop layer comprising oxygen doped SiC and SiC for interconnect structures | Liu Huang, John Sudijono | 2009-05-26 |
| 7052932 | Oxygen doped SiC for Cu barrier and etch stop layer in dual damascene fabrication | Liu Huang, John Sudijono | 2006-05-30 |