Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12309908 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Atsushi Ueda | 2025-05-20 |
| 11789374 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yusuke Hoshino, Yukio Watanabe, Toshihiro Nishisaka, Atsushi Ueda, Takayuki OSANAI +1 more | 2023-10-17 |
| 11483917 | Chamber device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Atsushi Ueda, Takayuki OSANAI | 2022-10-25 |
| 11366394 | Extreme ultraviolet light generation system and electronic device manufacturing method | Atsushi Ueda, Takayuki OSANAI | 2022-06-21 |
| 11363705 | Extreme ultraviolet light generation apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method | Takayuki OSANAI, Atsushi Ueda, Akihiro Ohsawa, Toshiya Shintani, Yoshiaki Yoshida +2 more | 2022-06-14 |
| 11350514 | Extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Atsushi Ueda, Takayuki OSANAI | 2022-05-31 |