Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810555 | Absolute encoder that provides increased accuracy against defect in scale thereof | — | 2017-11-07 |
| 9267820 | Two-dimensional absolute encoder and scale with marks each having one of a plurality of different characteristic values | Makiko Ogasawara | 2016-02-23 |
| 9040900 | Two-dimensional absolute encoder and scale therefor | — | 2015-05-26 |
| 8860949 | Interferometer | Ryo Sasaki, Koichi Masegi | 2014-10-14 |
| 8785838 | Absolute rotary encoder | — | 2014-07-22 |
| 8759747 | Absolute rotary encoder | — | 2014-06-24 |
| 8742322 | Encoder and interferometer that generate M-phase signals by multiplying N-phase signals by M coefficient sets, where N is not less than 6 and M is not smaller than 2 | — | 2014-06-03 |
| 8416387 | Wavelength shift measuring apparatus, optical source apparatus, interference measuring apparatus, exposure apparatus, and device manufacturing method | — | 2013-04-09 |
| 8243279 | Displacement measurement apparatus | — | 2012-08-14 |
| 8228508 | Origin detection apparatus, displacement measurement apparatus and optical apparatus | — | 2012-07-24 |
| 7554671 | Absolute position measurement apparatus | Hidejiro Kadowaki, Shigeki Kato | 2009-06-30 |
| 7551290 | Absolute position measurement apparatus | Hidejiro Kadowaki, Shigeki Kato | 2009-06-23 |
| 7391521 | Position detection apparatus and method | — | 2008-06-24 |
| 7375820 | Interference measuring apparatus for detecting a plurality of stable phase difference signals | Hidejiro Kadowaki, Yasushi Kaneda, Shigeki Kato, Takayuki Kadoshima, Sakae Horyu | 2008-05-20 |
| 7259863 | Grating interference type optical encoder | — | 2007-08-21 |
| 7061624 | Grating interference type optical encoder | — | 2006-06-13 |
| 7054095 | Displacement detection apparatus, and magnetic recording apparatus and encoder using the displacement detection apparatus | — | 2006-05-30 |
| 7034947 | Compact interference measuring apparatus for detecting the magnitude and direction of positional deviation | Hidejiro Kadowaki, Yasushi Kaneda, Shigeki Kato, Takayuki Kadoshima, Sakae Horyu | 2006-04-25 |
| 6958469 | Diffraction grating interference system encoder for detecting displacement information | — | 2005-10-25 |
| 6674066 | Encoder | Yasushi Kaneda, Hidejiro Kadowaki, Shigeki Kato, Takayuki Kadoshima, Sakae Horyu | 2004-01-06 |
| 6657181 | Optical element used in compact interference measuring apparatus detecting plurality of phase difference signals | Hidejiro Kadowaki, Yasushi Kaneda, Shigeki Kato, Takayuki Kadoshima, Sakae Horyu | 2003-12-02 |
| 6618218 | Displacement detecting apparatus and information recording apparatus | Hidejiro Kadowaki, Yasushi Kaneda, Shigeki Kato, Takayuki Kadoshima, Sakae Horyu | 2003-09-09 |
| 6570660 | Measuring instrument | Takayuki Kadoshima | 2003-05-27 |
| 6493170 | Interference device and position detection device using the same | Shigeki Kato | 2002-12-10 |
| 6473184 | Interferometer which divides light beams into a plurality of beams with different optical paths | Hidejiro Kadowaki, Yasushi Kaneda, Shigeki Kato, Takayuki Kadoshima, Sakae Horyu | 2002-10-29 |