Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9136091 | Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams | Toshifumi Kimba | 2015-09-15 |
| 8639463 | Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams | Toshifumi Kimba | 2014-01-28 |
| 8280664 | XY-coordinate compensation apparatus and method in sample pattern inspection apparatus | Toshifumi Kimba | 2012-10-02 |