Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538701 | Method of inspecting a semiconductor processing chamber using a vision sensor, and method for manufacturing a semiconductor device using the same | Taehyoung Lee, Byeongsang Kim, Sung Chai Kim, Wooram Kim, Kyungwon Yun +2 more | 2022-12-27 |