Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10465290 | Substrate processing apparatus | Minjong Kim, Seonggil Park, Jaebeom PARK, Jung-soo YOON, Choongrae Cho +1 more | 2019-11-05 |
| 9576848 | Method of treating a porous dielectric layer and a method of fabricating a semiconductor device using the same | Taejin Yim, Thomas Oszinda, Byunghee Kim, Sanghoon Ahn, Naein Lee | 2017-02-21 |
| 8956458 | Vapor deposition device and vapor deposition method | Takahiro Kozawa, Kenji Nakashima, Takahiro Ito | 2015-02-17 |
| 8703590 | Vapor-phase growth method for semiconductor film | Takahiro Ito, Takahiro Kozawa, Kenji Nakashima | 2014-04-22 |