Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072318 | Chamber component cleanliness measurement system | Amir A. Yasseri, Duane Outka, Armen Avoyan, John Daugherty, Girish M. HUNDI +1 more | 2024-08-27 |
| 10391526 | Electrostatic chuck cleaning fixture | Armen Avoyan, Cliff LaCroix, Hong Shih | 2019-08-27 |
| 9406534 | Wet clean process for cleaning plasma processing chamber components | Armen Avoyan | 2016-08-02 |