Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7474382 | Method for determining focus deviation amount in pattern exposure and pattern exposure method | Hirofumi Fukumoto, Naohiko Ujimaru, Fumio Iwamoto | 2009-01-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7474382 | Method for determining focus deviation amount in pattern exposure and pattern exposure method | Hirofumi Fukumoto, Naohiko Ujimaru, Fumio Iwamoto | 2009-01-06 |