| 7981216 |
Vacuum processing apparatus |
Keiji Ishibashi, Masahiko Tanaka, Akira Kumagai, Manabu Ikemoto |
2011-07-19 |
| 7709063 |
Remote plasma apparatus for processing substrate with two types of gases |
Hiroshi Nogami |
2010-05-04 |
| 7585708 |
Method for manufacturing a thin-film transistor |
Yoshinobu Satou, Hiroshi Tanabe |
2009-09-08 |
| 7392759 |
Remote plasma apparatus for processing substrate with two types of gases |
Hiroshi Nogami |
2008-07-01 |
| 7119363 |
Thin film transistor formed on a transparent substrate |
Yoshinobu Satou, Hiroshi Tanabe |
2006-10-10 |
| 7067436 |
Method of forming silicon oxide film and forming apparatus thereof |
Ge Xu |
2006-06-27 |
| 6851384 |
Remote plasma apparatus for processing substrate with two types of gases |
Hiroshi Nogami |
2005-02-08 |
| 6830786 |
Silicon oxide film, method of forming the silicon oxide film, and apparatus for depositing the silicon oxide film |
Hiroshi Tanabe |
2004-12-14 |
| 6822263 |
Thin film transistor formed on a transparent substrate |
Yoshinobu Satou, Hiroshi Tanabe |
2004-11-23 |
| 6779483 |
Plasma CVD apparatus for large area CVD film |
Manabu Ikemoto |
2004-08-24 |
| 6703267 |
Method of manufacturing thin film transistor |
Hiroshi Tanabe, Hiroshi Okumura, Yoshinobu Sato |
2004-03-09 |
| 6663715 |
Plasma CVD apparatus for large area CVD film |
Manabu Ikemoto |
2003-12-16 |
| 6537911 |
Chemical vapor deposition method |
Sang-Tae Ko |
2003-03-25 |
| 6444327 |
Silicon oxide film, method of forming the silicon oxide film, and apparatus for depositing the silicon oxide film |
Hiroshi Tanabe |
2002-09-03 |
| 6444508 |
Method of manufacturing thin film transistor |
Hiroshi Tanabe, Hiroshi Okumura, Yoshinobu Sato |
2002-09-03 |
| 6436487 |
Method for depositing a silicon oxide film |
Manabu Ikemoto |
2002-08-20 |
| 6383299 |
Silicon oxide film, method of forming the silicon oxide film, and apparatus for depositing the silicon oxide film |
Hiroshi Tanabe |
2002-05-07 |
| 6281053 |
Thin film transistor with reduced hydrogen passivation process time |
— |
2001-08-28 |
| 6258638 |
Method of manufacturing thin film transistor |
Hiroshi Tanabe, Hiroshi Okumura, Yoshinobu Sato |
2001-07-10 |
| 6118139 |
Thin film transistor with reduced hydrogen passivation process time |
— |
2000-09-12 |
| 5998838 |
Thin film transistor |
Hiroshi Tanabe, Hiroshi Okumura, Yoshinobu Sato |
1999-12-07 |
