Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9752253 | Epitaxial growth apparatus | Kimitaka Okamoto, Haruki Shoji | 2017-09-05 |
| 9670581 | Production method of epitaxial silicon wafer and vapor deposition apparatus | Motoki Goto, Yusuke Kurozumi, Hitoshi Takamiya | 2017-06-06 |