Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9670581 | Production method of epitaxial silicon wafer and vapor deposition apparatus | Motoki Goto, Kan Yoshitake, Hitoshi Takamiya | 2017-06-06 |
| 7785419 | Epitaxial apparatus | Shizuka Tateishi, Yasuhiro Rikihisa | 2010-08-31 |