| 5059013 |
Illumination system to produce self-luminous light beam of selected cross-section, uniform intensity and selected numerical aperture |
— |
1991-10-22 |
| 4991962 |
High precision alignment system for microlithography |
— |
1991-02-12 |
| 4924257 |
Scan and repeat high resolution projection lithography system |
— |
1990-05-08 |
| 4881231 |
Frequency-stabilized line-narrowed excimer laser source system for high resolution lithography |
— |
1989-11-14 |
| 4547044 |
Beam-folding wedge tunnel |
Milton Russell Latta |
1985-10-15 |
| 4521087 |
Optical system with diffuser for transformation of a collimated beam into a self-luminous arc with required curvature and numerical aperture |
Lawrence P. Hayes, deceased, by Ellen J. Hayes, administratrix, Randall T. Kerth |
1985-06-04 |
| 4516832 |
Apparatus for transformation of a collimated beam into a source of _required shape and numerical aperture |
Milton Russell Latta |
1985-05-14 |
| 4458994 |
High resolution optical lithography method and apparatus having excimer laser light source and stimulated Raman shifting |
Carlton G. Willson |
1984-07-10 |
| 4444456 |
Holographic method and apparatus for transformation of a light beam into a line source of required curvature and finite numerical aperture |
Milton Russell Latta, Glenn T. Sincerbox |
1984-04-24 |
| 4382660 |
Optical transistors and logic circuits embodying the same |
George W. Pratt, Jr. |
1983-05-10 |
| 4252410 |
Polarization rotation method and apparatus |
— |
1981-02-24 |
