Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8685498 | Coated film forming method | Takahiro Miyata, Masao Murata, Mitsuru Yahagi, Kyuzo Nakamura, Atsushi Kira +4 more | 2014-04-01 |
| 8408503 | Stage apparatus | Yasuzo Tanaka, Mitsuru Yahagi, Hirofumi Minami, Makoto Takahashi, Shinya Ito | 2013-04-02 |
| 8286318 | Stage apparatus assembling method | Yasuzo Tanaka, Mitsuru Yahagi, Hirofumi Minami, Makoto Takahashi, Shinya Ito | 2012-10-16 |
| 8205952 | Spacer placing method | Takumi Namekawa, Kouji Hane, Masasuke Matsudai, Yoshio Sunaga, Hidenori Suwa | 2012-06-26 |
| 8100524 | Stage apparatus | Yasuzo Tanaka, Mitsuru Yahagi, Hirofumi Minami, Makoto Takahashi, Shinya Ito | 2012-01-24 |
| 7671962 | Spacer forming method and spacer forming apparatus | Yasuzo Tanaka, Masao Murata, Hiroshi Koshina, Hiroto Uchida, Koji Hane +2 more | 2010-03-02 |
| 7645112 | Transport apparatus, control method for the same, and vacuum processing system | Hirofumi Minami, Kenji Ago, Takafumi Kawaguchi, Toshio Koike | 2010-01-12 |
| 7594406 | Regenerator and cryogenics pump | Yoshinobu Murayama, Shinji Furuya, Hidetoshi Morimoto | 2009-09-29 |
| 7572093 | Transport apparatus, control method for the same, and vacuum processing system | Hirofumi Minami, Kenji Ago, Takafumi Kawaguchi, Toshio Koike | 2009-08-11 |
| 7472987 | Head module, printing apparatus, and printing method | Hiroto Uchida, Masao Murata, Yasuzo Tanaka, Hiroshi Koshina, Yuya Inoue +2 more | 2009-01-06 |
| 6840732 | Transport apparatus and vacuum processing system using the same | Hirofumi Minami | 2005-01-11 |
| 5184072 | Apparatus for measuring weak static magnetic field using superconduction strips and a SQUID magnetometer | Qiquan Geng, Kazunori Chihara, Hirofumi Minami, Eiichi Goto | 1993-02-02 |
| 5181383 | Refrigerator | Eiichi Goto, Qiquan Geng | 1993-01-26 |
| 5053707 | Apparatus for positioning a pick-up coil for detecting magnetic flux quantum trapped in a superconductor | Hirofumi Minami, Humio Naruse, Eiichi Goto | 1991-10-01 |
| 4848814 | Wafer transfer hand | Takeo Suzuki | 1989-07-18 |