Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454563 | Wafer treatment chamber having thermal reflector | Kang-Wook Moon, Yong-Woon Son, Heung-ahn Kwon | 2002-09-24 |
| 6015758 | Method of stripping a wafer of its film with gas injected into a CVD apparatus in which the wafer is disposed | Joong-Il An, Kyung Su Kim, Jung Ki Kim | 2000-01-18 |