Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805810 | Method & apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Denise Peardon Ward | 2004-10-19 |
| 6769288 | Method and assembly for detecting a leak in a plasma system | Pamela Peardon Denise Ward, Michael Lane Smith, Jr. | 2004-08-03 |
| 6419801 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2002-07-16 |
| 6383402 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Denise Peardon Ward | 2002-05-07 |
| 6275740 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2001-08-14 |
| 6269278 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2001-07-31 |
| 6261470 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2001-07-17 |
| 6254717 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2001-07-03 |
| 6246473 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2001-06-12 |
| 6223755 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2001-05-01 |
| 6221679 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2001-04-24 |
| 6192826 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2001-02-27 |
| 6169933 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2001-01-02 |
| 6165312 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2000-12-26 |
| 6157447 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2000-12-05 |
| 6132577 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2000-10-17 |
| 6134005 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2000-10-17 |
| 6123983 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2000-09-26 |
| 6090302 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2000-07-18 |
| 6077386 | Method and apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Peardon Denise Ward | 2000-06-20 |
| 5015346 | Electrochemical method for defect delineation in silicon-on-insulator wafers | Terry R. Guilinger, Howland Jones, Michael J. Kelly, John W. Medernach, Sylvia S. Tsao | 1991-05-14 |
| 4995954 | Porous siliconformation and etching process for use in silicon micromachining | Terry R. Guilinger, Michael J. Kelly, Samuel B. Martin, Sylvia S. Tsao | 1991-02-26 |