Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5023200 | Formation of multiple levels of porous silicon for buried insulators and conductors in silicon device technologies | Robert S. Blewer, Terry R. Gullinger, Michael J. Kelly | 1991-06-11 |
| 5015346 | Electrochemical method for defect delineation in silicon-on-insulator wafers | Terry R. Guilinger, Howland Jones, Michael J. Kelly, John W. Medernach, Joel O'Don Stevenson | 1991-05-14 |
| 4995954 | Porous siliconformation and etching process for use in silicon micromachining | Terry R. Guilinger, Michael J. Kelly, Samuel B. Martin, Joel O'Don Stevenson | 1991-02-26 |