| 9989856 |
Method of manufacturing semiconductor devices |
Jung-Woo Seo, Sang Jin Kim, Jong-Hoon Nah, Choon-Ho Song |
2018-06-05 |
| 9859175 |
Substrate processing system, method of managing the same and method of manufacturing semiconductor device with the same |
Kiwook Song, Bum-Soo Kim, Kye Hyun Baek, Masayuki Tomoyasu, Eunwoo Lee |
2018-01-02 |
| 9299811 |
Methods of fabricating semiconductor devices |
Wook-Je Kim, Jae-yup Chung, Cheol Kyu Kim, Hee-Soo Kang, Hyun-Jo Kim +5 more |
2016-03-29 |
| 8906757 |
Methods of forming patterns of a semiconductor device |
Myeong-Cheol Kim, Il-Sup Kim, Cheol Kyu Kim, Jong-Chan Shin, Jong-Wook Lee +2 more |
2014-12-09 |
| 8569140 |
Method of fabricating semiconductor device |
Kyu Tae Kim, Tae Han Kim |
2013-10-29 |
| 8563412 |
Method of fabricating semiconductor device |
Kyu Tae Kim |
2013-10-22 |
| 8394697 |
Methods of forming capacitors for semiconductor memory devices |
Jeong-sic Jeon, Chun-Suk Suh, Yoo-Sang Hwang |
2013-03-12 |
| 7888724 |
Capacitors for semiconductor memory devices |
Jeong-sic Jeon, Chun-Suk Suh, Yoo-Sang Hwang |
2011-02-15 |
| 7851354 |
Semiconductor memory device having local etch stopper and method of manufacturing the same |
Jung-Woo Seo, Tae-hyuk Ahn, Jeong-sic Jeon, Jun-sik Hong, Young Sun CHO |
2010-12-14 |
| 7682778 |
Methods of forming contact plugs in semiconductor devices |
Jung-Woo Seo, Tae-hyuk Ahn |
2010-03-23 |
| 7648875 |
Methods for forming DRAM devices including protective patterns and related devices |
Jung-Woo Seo, Jun-sik Hong, Jeong-sic Jeon |
2010-01-19 |
| 7511328 |
Semiconductor device having raised cell landing pad and method of fabricating the same |
Jung-Woo Seo, Tae-hyuk Ahn |
2009-03-31 |
| 7462899 |
Semiconductor memory device having local etch stopper and method of manufacturing the same |
Jung-Woo Seo, Tae-hyuk Ahn, Jeong-sic Jeon, Jun-sik Hong, Young Sun CHO |
2008-12-09 |
| 7074725 |
Method for forming a storage node of a capacitor |
Jun-sik Hong, Young-ki Hong, Tae-hyuk Ahn |
2006-07-11 |
| 5476807 |
Method for forming fine patterns in a semiconductor device |
Kang Hyun Lee, Hyoung-sub Kim, Jae-Ho Kim, Min-Seog Han |
1995-12-19 |
| 5252177 |
Method for forming a multilayer wiring of a semiconductor device |
Jin Hong Kim, Jung-In Hong |
1993-10-12 |
