Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6985211 | Lithographic apparatus, device manufacturing methods, devices manufactured thereby, method of manufacturing a reflector, reflector manufactured thereby and phase shift mask | Mandeep Singh | 2006-01-10 |
| 6800861 | Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system | — | 2004-10-05 |
| 6788644 | Devuce and method for forming a focus error signal based on ohase difference between corresponding parts of detector signals | — | 2004-09-07 |
| 6781104 | Device for scanning an optical record carrier | — | 2004-08-24 |
| 6781740 | Achromatic phase shift device and interferometer using achromatic phase shift device | Hendrik Bokhove | 2004-08-24 |
| 6777140 | Lithographic apparatus, device manufacturing methods, devices manufactured thereby, method of manufacturing a reflector, reflector manufactured thereby and phase shift mask | Mandeep Singh | 2004-08-17 |
| 6556648 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Matthieu Frédéric BAL, Florian Bociort | 2003-04-29 |
| 6542219 | Optical correction plate, and its application in a lithographic projection apparatus | Cornelis J. van der Laan | 2003-04-01 |
| 6396067 | Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system | — | 2002-05-28 |
| 6386715 | Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system | — | 2002-05-14 |
| 6381071 | Lenticular device | Marinus Josephus Jakobus Dona | 2002-04-30 |
| 6373552 | Optical correction plate, and its application in a lithographic projection apparatus | Cornelis J. van der Laan | 2002-04-16 |
| 6366335 | Polarization-sensitive beam splitter, method of manufacturing such a beam splitter and magneto-optical scanning device including such a beam splitter | Rifat A. M. Hikmet, Willem Gerard Ophey | 2002-04-02 |
| 6317276 | Optical lens system and scanning device provided with such a system | — | 2001-11-13 |
| 6299318 | Mirror projector system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system | — | 2001-10-09 |
| 6280906 | Method of imaging a mask pattern on a substrate by means of EUV radiation, and apparatus and mask for performing the method | Jan Verhoeven | 2001-08-28 |
| 6255661 | Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system | — | 2001-07-03 |
| 6199991 | Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system | — | 2001-03-13 |
| 6192022 | Focusing a light beam more than thirty focal depths from the aplanatic point with a plano-convex lens | Bernardus H.W. Hendriks | 2001-02-20 |
| 6108138 | Optical beam shaper, and radiation source unit and scanning device including said beam shaper | Willem Gerard Ophey | 2000-08-22 |
| 6081578 | Three-mirror system for lithographic projection, and projection apparatus comprising such a mirror system | — | 2000-06-27 |
| 6064641 | Focusing more than 30 depths from an aplanatic point of a plano-convex lens | — | 2000-05-16 |
| 6052237 | Objective lens and scanning device using such an objective lens | Willem G. Opheij | 2000-04-18 |
| 6038077 | Optical imaging system | — | 2000-03-14 |
| 5926450 | Device for optically scanning record carriers of different thicknesses | — | 1999-07-20 |