Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7714307 | Method of designing a projection system, lithographic apparatus and device manufacturing method | Maarten van Turnhout, Oana Elena Marinescu | 2010-05-11 |
| 6556648 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Matthieu Frédéric BAL, Josephus J. M. Braat | 2003-04-29 |