Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7714307 | Method of designing a projection system, lithographic apparatus and device manufacturing method | Florian Bociort, Oana Elena Marinescu | 2010-05-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7714307 | Method of designing a projection system, lithographic apparatus and device manufacturing method | Florian Bociort, Oana Elena Marinescu | 2010-05-11 |