Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10940426 | Adsorbent-assisted stabilization of highly reactive gases | Glenn M. Tom, Paul Wai-Man Siu, Omar K. Farha, Ross James Verploegh | 2021-03-09 |
| 6423284 | Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases | Robert M. Vermeulen | 2002-07-23 |