Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6363294 | Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision | Philippe Coronel, Renzo Maccagnan, Jean-Phillippe Vassilakis | 2002-03-26 |
| 5898500 | Device and method for three-dimensional measurements and observation in situ of a surface layer deposited on a thin-film stack | Roland Kleim | 1999-04-27 |
| 5807761 | Method for real-time in-situ monitoring of a trench formation process | Philippe Coronel | 1998-09-15 |
| 5748296 | Method and device for in situ quantification, by reflectometry, of the morphology of a localized region during etching of the surface layer of a thin-film structure | — | 1998-05-05 |
| 5658418 | Apparatus for monitoring the dry etching of a dielectric film to a given thickness in an integrated circuit | Philippe Coronel | 1997-08-19 |
| 5648849 | Method of and device for in situ real time quantification of the morphology and thickness of a localized area of a surface layer of a thin layer structure during treatment of the latter | Jacky Mathias | 1997-07-15 |
| 5355217 | Assembly for simultaneous observation and laser interferometric measurements, in particular on thin-film structures | Jacky Mathias | 1994-10-11 |
| 4676644 | Device for monitoring the thickness of thin layers | — | 1987-06-30 |
| 4207834 | Process and devices for the elaboration of preforms for optical fibers | Alain Mocellin, Michel A. Braguier, Roger J. Tueta | 1980-06-17 |